Spectra Precision Focus 30 - Servo drive units; Location servo drive units; Technical specification

Chapter 3
Theory of Operation
P/N 79000035_SM, Version 1.5 3 - 29 Focus 30/35 Service Manual
Servo drive units
Location servo drive units
Fig. 3-28 Location of servo drive system
Technical specification
• Maximum speed up to 100 gon/sec
• Single step at coarse motion: 60cc
• Single step at fine motion: 0,9cc
• Motion range of 10000steps = 0,9gon
Holder
Holder
Hz knob
V knob
Hz coarse drive motor
with clamp disc
V coarse
drive motor
with clamp disc
V fine
drive motor
Hz fine drive motor
V Tension gear
Hz Tension gear
MCB board include
V angle control with
light barrier
Hz slip contact board
with light barrier