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Spectra Precision Focus 30 - Cycle of System diagnose

Spectra Precision Focus 30
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Chapter 4
Troubleshooting
P/N 79000035_SM, Version 1.5 4 - 23 Focus 30/35 Service Manual
Cycle of System diagnose
Performance
5 Run system diagnose A. Enter Run System
diag.
B. The system diagnose
starts the sensor tests
in sequence:
Check Angle & Tilt
Check SF & EDM
Check H-Circle
Check V-Circle
Check Drives
Check Knobs
Check Trk & EDM
, see Cycle of System
diagnose.
C. Quit
Check
completed, Show
results?
with Enter.
D. Press
Yes to save the
status of all sensors
in the permanent
error/event log file
*.fsmx.
The selftest results will be shown as
Ok
status or error/event message codes.The
messages/codes are displayed in
combination of numerics 1-6 and
characters A-D.
Item Sequence Action by user Notes
1 Check Angle & Tilt Please wait... Selftest of angle and tilt reading sensors
runs automatically.
2
Check SF & EDM Please wait... Selftest Servo focus tests steps and
lightbarriers, runs automatically.
EDM performs internal measurements
automatically.
3
Check H-Circle Please do not touch! Selftest H-circle is reading diametrical
values from circle in one turn.
Instrument is moving.
4
Check V-Circle Please do not touch! Selftest V-circle is reading diametrical
values from circle in one turning.
Instrument is moving.
5
Check Drives Please do not touch! Selftest checks coarse drive and fine
drive values, testing the lightbarriers.
Instrument is moving.
Item Performance Action Notes
Check Angle & Tilt
Please wait...
Exit
Run system diag

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