Oxford Instruments OpAL - Page 58

OpAL Oxford Instruments Plasma Technology System Manual
Fig 3-11: Console left hand view showing hoist control valves
................................... 3-10
Fig 3-12: Typical hoist assembly ............................................................................... 3-11
Fig 3-13: Hoist pneumatic circuit .............................................................................. 3-12
Fig 3-14: Typical control system................................................................................ 3-14
Fig 3-15: Control plc ................................................................................................. 3-15
Fig 3-16: Temperature zones .................................................................................... 3-16
Fig 3-17: Heater Presets page.................................................................................... 3-17
Fig 3-18: Heater plc .................................................................................................. 3-18
Fig 3-19: Controls and indicators .............................................................................. 3-19
Fig 3-20: Precursor cabinet control panel .................................................................. 3-20
Fig 3-21: Gas pod interlock chain.............................................................................. 3-23
Fig 3-22: Typical ALD configuration .......................................................................... 3-25
Fig 3-23: Upper chamber configuration for plasma ALD ........................................... 3-27
Fig 3-24: Upper chamber configuration for thermal ALD........................................... 3-28
Fig 3-25: Lower chamber configuration for both thermal and plasma ALD ................ 3-29
Fig 3-26: Lower electrode.......................................................................................... 3-30
Fig 3-27: Vacuum system .......................................................................................... 3-31
Fig 3-28: Typical power distribution unit (cover removed) ......................................... 3-32
Fig 3-29: ICP 65 source ............................................................................................. 3-34
Fig 3-30: 94-81-9-11 Standard non-toxic gas line................................................... 3-36
Fig 3-31: 94-81-9-21 Standard toxic gas line .......................................................... 3-37
Fig 3-32: Typical 8-line gas pod................................................................................ 3-40
Fig 3-33: Precursor delivery layout in OpAL ............................................................... 3-42
Fig 3-34: Precursor arrangement inside cabinet......................................................... 3-43
Fig 3-35: Requirements for connecting bubblers ....................................................... 3-45
Fig 3-36: Glove box................................................................................................... 3-46
Table 3-1: Temperature zones .................................................................................. 3-16
Table 3-2: RF enable interlock chain details............................................................... 3-22
Table 3-3: Incompatible gases................................................................................... 3-23
Table 3-4: System link configuration ......................................................................... 3-24
Table 3-5: System LED monitoring............................................................................. 3-24
Table 3-6: Precursor manufacturers .......................................................................... 3-44
Table 3-7: Recommended precursor quantities.......................................................... 3-45
Description
Issue 1: August 07 Page 3-2 of 46 Printed: 07 August 2009 07:42