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Tektronix Keithley 4200A-SCS - Page 151

Tektronix Keithley 4200A-SCS
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Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System
4200A-913-01 Rev. A December 2020 6-43
Filter
Enable or disable the digital filter:
1 reading: 0
3 readings: 1
9 readings: 2
24 readings: 3
Delay595
Delay time for 595; maximum 199 s (default 0.07 s)
LeakageCorrection
Enable or disable the leakage current correction of the 595:
Disable: 0
Enable: 1
CabCompFile
The complete name and path for the cable compensation file; see Details
OffsetCorrect
Enable or disable an offset correction measurement:
Disable offset correction: 0
Enable offset correction: 1
InstldStr
CMTR 82 instrument ID; default is CMTR1; can be CMTR1 to CMTR4, depending
on your system configuration
InputPin
The DUT pin to which the 5951 input terminal is attached (1 to 72); if a value
of less than 1 is specified, no switch matrix connections are made
OutPin
The DUT pin to which the 5951 output terminal is attached (1 to 72); if a value
of less than 1 is specified, no switch matrix connections are made
CHF
Output; the measured array of high frequency capacitance values
CHF_ArrSize
This must be set to a value equal to the number of voltage steps in the sweep
or value = ((VSub_Stop VSub_Start) / VSub_Step 1)
VSub
Output; the array of bias voltages used
VSub_ArrSize
This must be set to a value equal to the number of voltage steps in the sweep
or value = ((VSub_Stop VSub_Start) / VSub_Step 1)
CQS
Output; the measured array of quasistatic capacitance values
CQS_ArrSize
This must be set to a value equal to the number of voltage steps in the sweep
or value = ((VSub_Stop VSub_Start) / VSub_Step 1)
G_or_R
Output; the array of measured conductance (G) or resistance (R) values
G_or_R_ArrSize
This must be set to a value equal to the number of voltage steps in the sweep
or value = ((VSub_Stop VSub_Start) / VSub_Step 1)
QT
Output; the array of Q/T from 595 output for each measurement step
QT_ArrSize
This must be set to a value equal to the number of voltage steps in the sweep
or value = ((VSub_Stop VSub_Start) / VSub_Step 1)
Details
This user module uses the 590 and 595 to perform simultaneous C-V measurements. The following
figure shows the default parameters for the SIMCVsweep82 user module.

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