Tektronix Keithley 4200A-SCS - C-V Sweep Example

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control
4-10 4200A-913-01 Rev. A December 2020
Clicking Cancel in a cable compensation dialog box aborts the cable compensation process. You
can start over by clicking Run.
Figure 56: Cable compensation dialog boxes
C-V sweep example
This example demonstrates how to control a Keithley Instruments 590 C-V Analyzer to acquire
capacitance verses voltage (CV) data from a MOS capacitor. In this example, the C-V Analyzer
applies a linear staircase voltage sweep to a capacitor. A capacitance measurement is made on
every voltage step of the sweep.
This example assumes that the 590 is connected directly to the DUT. The DUT could be a device
installed in a test fixture or a MOS capacitor on a wafer.
To do a C-V sweep:
1. Choose Select.
2. Select Tests.
3. Search for 590.
4. Select Add for the 590 C-V Sweep (590-cvsweep) test.
5. In the project tree, select 590-cvsweep.
6. Select Configure. The parameters are displayed.