Tektronix Keithley 4200A-SCS - Load, Align, and Contact the Wafer

Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control
9-16 4200A-913-01 Rev. A December 2020
Load, align, and contact the wafer
Using the ProberBench NT computer:
1. From the WaferMap Chuck menu, select Load Position. This brings the chuck to the front of
the prober.
Figure 149: Chuck menu
2. Place the wafer on the chuck.
3. From the Chuck menu, select Turn Vacuum ON.
4. Manually move the wafer to the Home Die.
5. From the Setup menu, select Home Die.
Figure 150: Setup menu