Tektronix Keithley 4200A-SCS User Manual

Model 4200A-SCS Prober and External Instrument Control Section 4: Using a Model 590 C-V Analyzer
4200A-913-01 Rev. A December 2020 4-15
Procedure
For each range and test frequency specified by the input parameters:
1. You are prompted to open the circuit so that an offset capacitance measurement can be made.
2. When the offset capacitance measurement is completed, you are prompted to connect the low
value capacitor for the selected range. The system does the low value capacitor compensation.
3. You are prompted to connect the high value capacitor for the selected range. The system does
the high value capacitor compensation.
4. You are prompted to reconnect the low capacitor.
5. The nominal and measured values are displayed in a dialog box. You can:
▪ Select Cancel to abort the procedure if the results are not correct. No changes to the cable
compensation file occur.
▪ Select Save to save the cable compensation values.
Also see
None
Cmeas590 user module
The Cmeas590 routine measures capacitance and conductance using the Keithley Instruments 590 C-V Analyzer.
You can make an offset correction measurement and use cable compensation.
Usage
status = Cmeas590(char *CabCompFile, char *InstIdStr, int InputPin, int OutPin, int
OffsetCorrect, int Frequency, double DefaultBias, double StartTime, double Range,
int Model, int Filter, int ReadingRate, double *C, double *V, double *G_or_R);
status
Returned values; see Details
CabCompFile
The complete name and path for the cable compensation file; see Details
InstIdStr
The CMTR instrument ID; CMTR1, CMTR2, CMTR3, or CMTR4, depending on your
system configuration
InputPin
The DUT pin to which the 590 input terminal is attached (−1 to 72); if a value of less
than 1 is specified, no switch matrix connection is made; see Details
OutPin
The DUT pin to which the 590 output terminal is attached (−1 to 72); if a value of
less than 1 is specified, no switch matrix connection is made; see Details
OffsetCorrect
Determines if an offset correction measurement should be made:
▪ Do not make offset measurement: 0
▪ Make offset measurement: 1
Frequency
The measurement frequency to use:
▪ 100 kHz: 0
▪ 1 MHz: 1
DefaultBias
The DC bias to use for the measurement: −20 to +20 V
StartTime
The amount of time to delay after applying the DefaultBias voltage step
(0.001 s to 65 s)
Range
The measurement range to use: 1 to 4; see Details

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English

Summary

Safety Precautions

General Safety Precautions

Essential safety guidelines for operating the instrument and associated equipment.

Electrical Shock Hazards

Details on identifying and avoiding hazardous voltage conditions and electric shock risks.

Using Switch Matrices

Matrix Card Types

KCon Setup for Switch Matrix

Configure and Use a Series 700 Switching System

Update Switch Configuration in KCon

Guide to managing instrumentation configuration using KCon after physical connections.

Set Up Measurements in Clarius

Steps to configure and run tests using the Clarius application with the switching system.

Using a Model 590 C-V Analyzer

Model 590 Test Examples

Using a Keysight 4284/4980A LCR Meter

C-V Measurement Basics

Capacitance Measurement Tests

Using KCon to Add Keysight LCR Meter

Instructions for adding the Keysight LCR Meter to the 4200A-SCS system configuration.

Using a Model 82 C-V System

Capacitance Measurement Tests

User modules for capacitance testing using the Model 82, including C-t, Simultaneous C-V, and QTsweep.

Simultaneous C-V Measurements

How the 590 and 595 measure capacitance during the same voltage sweep for C-V analysis.

Cable Compensation

Procedure to correct unwanted capacitances by connecting known sources.

Model 82 Projects

Using a Keysight 8110A/8111A Pulse Generator

Pulse Generator Tests

Using KCon to Add Keysight Pulse Generator

Steps to add the pulse generator to the 4200A-SCS system configuration using KCon.

Set Up a Probe Station

Prober Control Overview

How the 4200A-SCS controls probe stations using GPIB or RS-232 interfaces.

PRBGEN User Library

Prober-control software provided by vendors, accessed via the PRBGEN user modules.

Example Test Execution Sequence: Probesites Project

Using a Cascade Microtech PA200 Prober

Cascade Microtech PA200 Prober Software

Load, Align, and Contact the Wafer

Using a Micromanipulator 8860 Prober

Micromanipulator 8860 Prober Software

Set Up Wafer Geometry

Create a Site Definition and Define a Probe List

Using a Cascade Summit-12000 Prober

Cascade Summit-12000 Prober Software

Set Up Probers using the Velox Prober Control Software

Set Up Probers using the Nucleus UI Prober Control Software

Using a Signatone CM500 Prober

Signatone CM500 Prober Software

Using an MPI Probe Station

MPI Prober Software

Probe Station Configuration

Steps to set up and configure the MPI prober for use with the 4200A-SCS.

Set Up Communications

Use KCon to Add a Prober