Tektronix Keithley 4200A-SCS User Manual

Section 10: Using a Micromanipulator 8860 Prober Model 4200A-SCS Prober and External Instrument Control
10-6 4200A-913-01 Rev. A December 2020
# prbcnfg.dat - EXAMPLE Prober Configuration File for MM40 Prober
#
# The following tag, "PRBCNFG", is used by the engine in order to determine
# the MAX number of SLOTS and CASSETTES for a given prober at runtime.
#
<PRBCNFG>
#
# for OPTIONS ""== NULL, max 32 chars in string
#
# Example
# 01234567890
#PROBER_1_OPTIONS=1,1,1,1,1,1
#
#
# OcrPresent
# AutoAlnPresent
# ProfilerPresent
# HotchuckPresent
# HandlerPresent
# Probe2PadPresent
#
#
# The PROBER_x_PROBTYPE fields needs to be set to one of the following names.
# Configuration for serial probers:
#
# Example configuration for MM40 prober
#
#
PROBER_1_PROBTYPE=MM40
PROBER_1_OPTIONS=0,0,0,0,0,0
PROBER_1_IO_MODE=SERIAL
PROBER_1_DEVICE_NAME=COM1
PROBER_1_BAUDRATE=9600
PROBER_1_TIMEOUT=300
PROBER_1_SHORT_TIMEOUT=5
PROBER_1_MAX_SLOT=25
PROBER_1_MAX_CASSETTE=1
#
#
Set up wafer geometry
On the pcBridge computer:
1. From the pcLaunch window, click the pcNav button to open the pcNav window.
Figure 181: pcNav button

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English

Summary

Safety Precautions

General Safety Precautions

Essential safety guidelines for operating the instrument and associated equipment.

Electrical Shock Hazards

Details on identifying and avoiding hazardous voltage conditions and electric shock risks.

Using Switch Matrices

Matrix Card Types

KCon Setup for Switch Matrix

Configure and Use a Series 700 Switching System

Update Switch Configuration in KCon

Guide to managing instrumentation configuration using KCon after physical connections.

Set Up Measurements in Clarius

Steps to configure and run tests using the Clarius application with the switching system.

Using a Model 590 C-V Analyzer

Model 590 Test Examples

Using a Keysight 4284/4980A LCR Meter

C-V Measurement Basics

Capacitance Measurement Tests

Using KCon to Add Keysight LCR Meter

Instructions for adding the Keysight LCR Meter to the 4200A-SCS system configuration.

Using a Model 82 C-V System

Capacitance Measurement Tests

User modules for capacitance testing using the Model 82, including C-t, Simultaneous C-V, and QTsweep.

Simultaneous C-V Measurements

How the 590 and 595 measure capacitance during the same voltage sweep for C-V analysis.

Cable Compensation

Procedure to correct unwanted capacitances by connecting known sources.

Model 82 Projects

Using a Keysight 8110A/8111A Pulse Generator

Pulse Generator Tests

Using KCon to Add Keysight Pulse Generator

Steps to add the pulse generator to the 4200A-SCS system configuration using KCon.

Set Up a Probe Station

Prober Control Overview

How the 4200A-SCS controls probe stations using GPIB or RS-232 interfaces.

PRBGEN User Library

Prober-control software provided by vendors, accessed via the PRBGEN user modules.

Example Test Execution Sequence: Probesites Project

Using a Cascade Microtech PA200 Prober

Cascade Microtech PA200 Prober Software

Load, Align, and Contact the Wafer

Using a Micromanipulator 8860 Prober

Micromanipulator 8860 Prober Software

Set Up Wafer Geometry

Create a Site Definition and Define a Probe List

Using a Cascade Summit-12000 Prober

Cascade Summit-12000 Prober Software

Set Up Probers using the Velox Prober Control Software

Set Up Probers using the Nucleus UI Prober Control Software

Using a Signatone CM500 Prober

Signatone CM500 Prober Software

Using an MPI Probe Station

MPI Prober Software

Probe Station Configuration

Steps to set up and configure the MPI prober for use with the 4200A-SCS.

Set Up Communications

Use KCon to Add a Prober