Model 4200A-SCS Prober and External Instrument Control Section 8: Set up a probe station
4200A-913-01 Rev. A December 2020 8-3
Cascade Microtech Model PA200
Cascade Microtech PA200 Prober (on page 9-1)
Micromanipulator Model 8860
Micromanipulator 8860 Prober (on page 10-1)
Using a Manual or Fake Prober (on page 11-1)
Cascade Summit-12000 Prober (on page 12-1)
Signatone CM500 Prober (on page 13-1)
MPI TS2000, TS2000-DP, TS2000-HP, TS2000-SE,
TS3000, and TS3000-SE
Using an MPI Probe Station (on page 14-1)
Contact Keithley Instruments for the most up-to-date list of supported probe stations.
Use KCon to add the prober to the instrument list. See the information for the specific prober for
details. For information on KCon, refer to “Keithley Configuration Utility (KCon)” in Model 4200A-SCS
Setup and Maintenance User's Manual
PRBGEN user modules
Prober-control software provided by supported prober vendors gives access to the full feature set of
each prober. You use the prober-control software to define a list of wafer locations to be probed. The
4200A-SCS relies on the prober controller and associated software to maintain this probe list. The
PRBGEN user modules communicate with the prober controller, normally through the GPIB bus or
COM1 (serial bus) port, to instruct it to step through the probe list. This technique of prober control is
referred to as learn mode because the prober-control software is taught the physical location of each
probe location. The following table summarizes the user modules included in the PRBGEN prober
control user library.
Initializes the prober driver and establishes the reference site or die.
Instructs the prober to move the probe station into contact or to break contact between
the wafer and the test system pins (probe needles).
Instructs the prober to move to the next subsite or test element group in the probe list.
Instructs the prober to move to the next site or die in the probe list.
Before executing a Clarius project that uses the PRBGEN user library, you must create the probe list
using the appropriate vendor-specific prober-control software. Instructions for creating the probe list
for each supported prober are included in this manual (refer to Supported probers (on page 8-3)).
The example projects in the following topics describe a typical project setup. However, you can add
and arrange sites, subsites, and prober actions in the project in any order that is appropriate for your
system. The 4200A-SCS runs the items in the project in the order in which they are presented, from
top to bottom. You can also select the starting point for each run. For example, if you highlight a
device, only the tests and actions that are selected and under that device will be used when you
select Run.
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