Tektronix Keithley 4200A-SCS User Manual

Model 4200A-SCS Prober and External Instrument Control Section 9: Using a Cascade Microtech PA200 Prober
4200A-913-01 Rev. A December 2020 9-25
8. From the Options menu, select units (Microns or Mils).
9. Edit the table with the coordinates of the subsites.
10. From the Table menu, select Save or Save As.
An x in the On column defines the subsites that will be probed when using the subsite probing
project (in other words, when using PrSSMovNxt). Other subsites may be defined in the list.
Set the wafer map
On the ProberBench NT computer:
1. Select the ProberBench NT icon on the desktop.
Figure 166: ProberBench NT icon
2. From the ProberBench NT window, select the Wafer Map file.
Figure 167: ProberBench NT window

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English