Tektronix Keithley 4200A-SCS - Tutorial: Control a Probe Station

Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control
8-14 4200A-913-01 Rev. A December 2020
Details
The PrMovNxt function returns the values:
• 1: Success (PR_OK)
• 4: Next wafer loaded (confirmed)
• -1008: Invalid mode
• -1011: Operation invalid in mode
• -1013: Unintelligible response
• -1014: Movement failure
• -1015: Unexpected error
• -1027: Invalid parameter
Example
status = PrMovNxt(0);
Also see
None
Tutorial: Control a probe station
This tutorial demonstrates how to control a probe station to test five identical sites (or die or reticles)
on a sample wafer.
Each wafer site has two subsites (or test element groups). At each subsite there are two devices (or
test elements) to be tested:
• 4-terminal N-channel MOSFET
• 3-terminal NPN transistor
The subsites do not need to be identical, but for simplicity they are assumed to be the same. This is
illustrated in the following figure.