Tektronix Keithley 4200A-SCS - Capacitance Measurement Tests; Connections

Section 4: Using a Model 590 C-V Analyzer Model 4200A-SCS Prober and External Instrument Control
4-2 4200A-913-01 Rev. A December 2020
The following figure shows the three regions of a typical C-V curve for a MOS capacitor.
Figure 47: Typical C-V curve for a MOS capacitor
Capacitance measurement tests
The 4200A-SCS provides the following tests to perform C-V tests using the 590:
• 590 C-V Sweep (590-cvsweep): Makes a capacitance measurement at each step of a
user-configured linear voltage sweep.
• 590 C-V Pulse Sweep (590-cvpulsesweep): Makes a capacitance measurement at each step of
a user-configured pulsed voltage sweep.
• 590 C-t Sweep (590-ctsweep): Makes a specified number of capacitance measurements at a
specified time interval. Voltage is held constant for these capacitance measurements.
• 590 Capacitance Measurements (590-cmeas): Makes capacitance and conductance
measurements at a fixed bias voltage.
There are also user modules available for the 590. Refer to KI590ulib user library (on page 4-12).
Connections
This section describes basic BNC, triaxial, and GPIB connections. For additional information about
590 connections, see the Model 590 C-V Analyzer Instruction Manual.