Tektronix Keithley 4200A-SCS - Create a Site Definition and Define a Probe List

Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control
9-14 4200A-913-01 Rev. A December 2020
9. Click OK.
Refer to Clarius probesites and probesubsites examples for specifics on selecting sites
to probe.
10. Select File > Project > Save to save the WaferMap settings.
Figure 146: Save WaferMap settings
Create a site definition and define a probe list
Creating a site definition for single subsites for each die involves using the software to create a
selection of dies to probe. If a single subsite per die is to be probed, refer to Probesites Clarius project
example (on page 10-18). Creating a site definition for multiple subsites for each die involves using
the software to create a selection of dies to probe, but also includes creating a selection of the
subsites on each die that will be probed. If multiple subsites for each die will be probed, refer to
Probesubsites Clarius project example (on page 12-23).