Tektronix Keithley 4200A-SCS - Using a Model 590 C-V Analyzer

In this section:
Introduction .............................................................................. 4-1
C-V measurement basics ......................................................... 4-1
Capacitance measurement tests .............................................. 4-2
Connections ............................................................................. 4-2
Cable compensation ................................................................ 4-4
Using KCon to add 590 C-V Analyzer to system ...................... 4-5
Model 590 test examples ......................................................... 4-6
KI590ulib user library ............................................................. 4-12
Introduction
This section describes how to set up and use a Model 590 C-V Analyzer with the 4200A-SCS.
For details on 590 operation, refer to the Model 590 C-V Analyzer Instruction Manual.
C-V measurement basics
The Keithley Instruments Model 590 C-V Analyzer measures capacitance versus voltage (C-V) and
capacitance versus time (C-t) of semiconductor devices. Typically, C-V measurements are made on
capacitor-like devices, such as a metal-oxide-silicon capacitor (MOS capacitor).
The measurements of MOS capacitors study:
• The integrity of the gate oxide and semiconductor doping profile
• The lifetime of semiconductor material
• The interface quality between the gate oxide and silicon
• Other dielectric materials used in an integrated circuit
The voltage sweeping capability of the 590 makes it easy to make a series of capacitance
measurements that span the three regions of a C-V curve: the accumulation region, depletion region,
and inversion region.
Section 4
Using a Model 590 C-V Analyzer