Tektronix Keithley 4200A-SCS User Manual

Section 11: Using a manual or fake prober Model 4200A-SCS Prober and External Instrument Control
11-2 4200A-913-01 Rev. A December 2020
4. Issue a PrChuck command to tell the user to ensure that the first test site is ready for testing.
The PrChuck dialog box opens and the user continues by clicking OK. Tests on the site are
executed.
Figure 226: Prober Action Required dialog box: Move chuck
5. Issue a PrMovNxt command to tell the user to move to the next site to be tested on the wafer.
The PrMovNxt dialog box opens and the user continues by clicking OK.
Figure 227: Prober Action Required dialog: Move probes to next site
Subsite probing uses the PrssMovNxt command to move to the next subsite.
6. Issue PRChuck and PRMovNxt commands until all sites are tested.
Fake prober overview
Use the FAKE prober to test without probing. You can use this to take the prober offline when you
want to run the test without modifying your project. Configuring the environment for a FAKE prober
stops all prober actions.
When using the FAKE prober, you can execute tests individually or in a loop. This allows you to
debug projects without removing prober calls. Situations when the FAKE prober mode may be useful:
1. Looping on the same wafer location using a project that supports wafer prober operations (for
instance, testing one site 100 times instead of testing 100 different sites once).
2. Disabling prober function calls until the testing portions of the project are functioning correctly.

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English

Summary

Safety Precautions

General Safety Precautions

Essential safety guidelines for operating the instrument and associated equipment.

Electrical Shock Hazards

Details on identifying and avoiding hazardous voltage conditions and electric shock risks.

Using Switch Matrices

Matrix Card Types

KCon Setup for Switch Matrix

Configure and Use a Series 700 Switching System

Update Switch Configuration in KCon

Guide to managing instrumentation configuration using KCon after physical connections.

Set Up Measurements in Clarius

Steps to configure and run tests using the Clarius application with the switching system.

Using a Model 590 C-V Analyzer

Model 590 Test Examples

Using a Keysight 4284/4980A LCR Meter

C-V Measurement Basics

Capacitance Measurement Tests

Using KCon to Add Keysight LCR Meter

Instructions for adding the Keysight LCR Meter to the 4200A-SCS system configuration.

Using a Model 82 C-V System

Capacitance Measurement Tests

User modules for capacitance testing using the Model 82, including C-t, Simultaneous C-V, and QTsweep.

Simultaneous C-V Measurements

How the 590 and 595 measure capacitance during the same voltage sweep for C-V analysis.

Cable Compensation

Procedure to correct unwanted capacitances by connecting known sources.

Model 82 Projects

Using a Keysight 8110A/8111A Pulse Generator

Pulse Generator Tests

Using KCon to Add Keysight Pulse Generator

Steps to add the pulse generator to the 4200A-SCS system configuration using KCon.

Set Up a Probe Station

Prober Control Overview

How the 4200A-SCS controls probe stations using GPIB or RS-232 interfaces.

PRBGEN User Library

Prober-control software provided by vendors, accessed via the PRBGEN user modules.

Example Test Execution Sequence: Probesites Project

Using a Cascade Microtech PA200 Prober

Cascade Microtech PA200 Prober Software

Load, Align, and Contact the Wafer

Using a Micromanipulator 8860 Prober

Micromanipulator 8860 Prober Software

Set Up Wafer Geometry

Create a Site Definition and Define a Probe List

Using a Cascade Summit-12000 Prober

Cascade Summit-12000 Prober Software

Set Up Probers using the Velox Prober Control Software

Set Up Probers using the Nucleus UI Prober Control Software

Using a Signatone CM500 Prober

Signatone CM500 Prober Software

Using an MPI Probe Station

MPI Prober Software

Probe Station Configuration

Steps to set up and configure the MPI prober for use with the 4200A-SCS.

Set Up Communications

Use KCon to Add a Prober