Tektronix Keithley 4200A-SCS - Capacitance Measurement Tests

Section 5: Using a Keysight 4284/4980A LCR Meter Model 4200A-SCS Prober and External Instrument Control
5-2 4200A-913-01 Rev. A December 2020
A user-configured voltage sweep allows capacitance measurements that can span the three regions
of a C-V curve: The accumulation region, depletion region, and inversion region.
The following figure shows the three regions of a typical C-V curve for a MOS capacitor.
Figure 70: Typical C-V curve for a MOS capacitor
Capacitance measurement tests
The 4200A-SCS provides the following user modules to perform C-V tests using the Keysight Models
4284A and 4980A:
• CvSweep4284. C-V sweep test: Performs a capacitance and conductance measurement at each
step of a user-configured linear voltage sweep.
• Cmeas4284. C measurement: Performs a capacitance and conductance measurement at a fixed
bias voltage.
Details on the user modules for the Keysight Models 4284A and 4980A are provided in the
HP4284ulib User Library Reference (on page 5-8).
If needed, you can initially do an OPEN and SHORT correction on the 4284A or 4980A to achieve
the most accurate C-V measurements. See the Keysight 4284A or 4980A Operation Manual for
details.