Tektronix Keithley 4200A-SCS User Manual

Section 8: Set up a probe station Model 4200A-SCS Prober and External Instrument Control
8-6 4200A-913-01 Rev. A December 2020
Reference site (die)
The designated reference site is defined in the prober-init action by selecting Configure and
entering the parameters. This is the first stopping point of the prober once aligned. The physical
location of the reference site may be any coordinate that is selected on the wafer and is selected for
probing or marked for probing through the prober software. The coordinate system of the wafer is also
defined through the prober software. For example, the coordinates of the reference site shown in the
following figure are (3, 1).
For parameter descriptions, refer to the Help pane.
The defined reference site must match the physical location of the wafer. This is the location on the
wafer directly below the probe pins after the wafer has been loaded.
Figure 124: Sample reference site location

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English