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Tektronix Keithley 4200A-SCS - Load, Align, and Contact the Wafer

Tektronix Keithley 4200A-SCS
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Model 4200A-SCS Prober and External Instrument Control Section 12: Using a Cascade Summit-12000 Prober
4200A-913-01 Rev. A December 2020 12-15
Load, align, and contact the wafer
Velox prober-control software
For probers using the Velox prober-control software:
On the probe station computer, refer to the Velox user manual and help content for information on
how to load, unload, set chuck heights, align, contact, and set the home (also called reference)
position of the wafer.
Nucleus UI prober-control software
For probers using the Nucleus UI prober-control software:
1. On the probe-station computer, from the Nucleus toolbar, select Window > Motion Control. The
Motion Control window opens. See the following two figures.
Figure 261: Nucleus toolbar
Figure 262: Motion Control window

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