Tektronix Keithley 4200A-SCS User Manual

Section 9: Using a Cascade Microtech PA200 Prober Model 4200A-SCS Prober and External Instrument Control
9-18 4200A-913-01 Rev. A December 2020
Aligning the wafer
1. Enter Point 1 and Point 2 distances from the center using specific X die size multiples. See the
following figure. In other words, if the die size is: X = 13.573 mm, and Y = 14.818 mm, set up to
move four die to the left and also the right at 54.292 mm (4 • 13.573 mm = 54.292 mm).
Figure 152: Align the chuck
2. Select Automatically move chuck to each point.
3. Select Automatically turn on chuck vacuum.
4. Click Begin.
Start the Alignment Wizard
1. Move to Point 1 (left of center die align pad and pins).
2. Click Continue to start the Alignment Wizard.
3. Manually align pins and pads (POINT 1).
4. Click Continue (from POINT 1) and move 8 die (for this example) to the right.
Figure 153: Aligning the wafer: First point

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English