Tektronix Keithley 4200A-SCS User Manual

Model 4200A-SCS Prober and External Instrument Control Section 13: Using a Signatone CM500 Prober
4200A-913-01 Rev. A December 2020 13-13
2. Select Wafer as the subsite device.
Figure 317: CM500 Prober Edit Subsite window
3. Move the wafer stage to the HOME position.
All data recorded for the subsite is relative to the corner of the home die. You can record the position
of the subsite either by keying in the coordinates of the subsite using the keyboard, or by moving the
wafer to the actual position and clicking Enter.
4. To step through all the programmed sites and subsites, click the Run Program Site icon on the
toolbar.
5. Make sure the Subsite (template) is Enabled if subsites are to be used.
6. Click the To First Site button to move wafer stage to first site of probing lists.
Figure 318: CM500 Prober Enable Subsite
7. In the File menu bar, select the Save setup As command to save the file to a hard disk. You can
load this setup next time without going through all of the procedures again.
8. The Prober is now ready to accept a remote command from the 4200A-SCS.

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English