Tektronix Keithley 4200A-SCS - Page 10

Model 4200A-SCS Prober and External Instrument Control
Table of contents
Probesubsites Clarius project example ............................................................................ 10-23
Use KCon to add a prober..................................................................................................... 10-25
Clarius ................................................................................................................................... 10-26
Commands and error symbols ......................................................................................... 10-28
Using a manual or fake prober .............................................................................. 11-1
Using a manual or fake prober software ............................................................................ 11-1
Manual prober overview ..................................................................................................... 11-1
Fake prober overview ......................................................................................................... 11-2
Modifying the prober configuration file ............................................................................... 11-3
Probesites Clarius project example ................................................................................... 11-5
Use KCon to add a prober....................................................................................................... 11-5
Clarius ..................................................................................................................................... 11-6
Probesubsites Clarius project example .............................................................................. 11-7
Use KCon to add a prober....................................................................................................... 11-7
Clarius ..................................................................................................................................... 11-9
Using a Cascade Summit-12000 Prober ............................................................... 12-1
Cascade Summit 12000 prober software........................................................................... 12-1
Software version ..................................................................................................................... 12-1
Probe station configuration ................................................................................................ 12-1
Set up communications ........................................................................................................... 12-2
Set up wafer geometry ............................................................................................................ 12-8
Create a site definition and define a probe list ...................................................................... 12-12
Load, align, and contact the wafer ........................................................................................ 12-15
Probesites Clarius Project example ................................................................................. 12-20
Nucleus UI or Velox software ................................................................................................ 12-20
Use KCon to add a prober..................................................................................................... 12-20
Clarius ................................................................................................................................... 12-22
Probesubsites Clarius Project example ........................................................................... 12-23
Nucleus UI prober control software ....................................................................................... 12-23
Use KCon to add a prober..................................................................................................... 12-26
Clarius ................................................................................................................................... 12-27
Commands and error symbols ......................................................................................... 12-28
Using a Signatone CM500 Prober ......................................................................... 13-1
Signatone CM500 prober software .................................................................................... 13-1
Software versions .................................................................................................................... 13-1
Probe station configuration ................................................................................................ 13-1
Set up communications ........................................................................................................... 13-2
Modify the prober configuration file ......................................................................................... 13-3
Set up wafer geometry ............................................................................................................ 13-4
Load, align, and contact the wafer .......................................................................................... 13-6
Set up programmed sites without a subsite........................................................................... 13-10
Set up programmed sites with a subsite ............................................................................... 13-12
Clarius project example for probe sites ............................................................................ 13-14
CM500 .................................................................................................................................. 13-14