Tektronix Keithley 4200A-SCS User Manual

Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System
4200A-913-01 Rev. A December 2020 6-17
cvsweep test description
As described in Simultaneous C-V sweep (on page 6-16), the cvsweep UTM uses the
SIMCVsweep82 user module to make simultaneous C-V measurements. A 595 quasistatic
measurement is a two-step process that requires at least two charge measurements. As shown in the
figure below, charge measurements on two steps are made to yield a single quasistatic reading. The
590 makes a capacitance measurement on every second step of the staircase sweep.
Figure 94: Simultaneous C-V linear staircase sweep
The graph for this test plots 590 capacitance (red trace) and 595 quasistatic capacitance (blue trace)
versus bias voltage. The figure below shows a typical graph that is generated by this test.
The shape of the curves in the following figure indicate that measurements were made with the
device in equilibrium. If the curves for your test deviate significantly, the device was probably not in
equilibrium. Do the equilibrium test (QTsweep82) to determine the optimum delay time (Delay595
parameter) to use for the simcv test (SIMCVsweep82 user module).

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English