Tektronix Keithley 4200A-SCS User Manual

Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control
6-18 4200A-913-01 Rev. A December 2020
Figure 95: cvsweep graph
C-t sweep
The Model 82 uses the Model 590 to make a specified number of capacitance measurements using a
specified time interval between reading samples. The specified voltage bias is held constant for this
test. Details on simultaneous C-t measurements are provided in C-t measurements (on page 6-2).
This example assumes that the Model 82 is connected directly to the DUT. The DUT can be a device
installed in a test fixture or a substrate on a wafer.
To perform a CtSweep:
1. In the project tree, select ctsweep.
2. Select Configure.
3. Modify the test parameters as needed. If you use the parameters shown in the figure below, the
Model 82 makes 100 capacitance measurements.
4. Select Run.
Figure 96: CtSweep82 user module

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English