Tektronix Keithley 4200A-SCS User Manual

Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control
6-34 4200A-913-01 Rev. A December 2020
The analog filter, enabled with Filter590, can minimize the amount of noise that appears in the
readings. It does, however, increase the measurement time.
Reading_rate valid inputs
Reading rate
Nominal reading rate
(per second)
Readings
Display resolution
(digits)
1
75
C,G,V
3.5
2
18
C,G,V
4.5
3
10
C,G,V
4.5
4
1
C,G,V
4.5
Range590 valid range values
Range
100 kHz
1 MHz
1
2 pF / 2 µs
20 pF / 200 µs
2
20 pF / 20 µs
20 pF / 200 µs
3
200 pF / 200 µs
200 pF / 2 ms
4
2 nF / 2 ms
2 nF / 20 ms
If CabCompFile does not exist, or if there is no path specified (null string), the default compensation
parameters are used. When entering the path, be sure to use two \ characters to separate each
directory. For example, if your cable file is in:
C:\calfiles\82cal.dat
You would enter:
C:\\calfiles\\82cal.dat
If you are controlling a switch matrix to route signals using a connection UTM (for example,
“connect”), you do not need connect InputPin and OutputPin. Set these parameters to 0.
The return values from status can be:
• 0: OK.
• -10000 (INVAL_INST_ID): The specified instrument ID does not exist(INVAL_INST_ID): The
specified instrument ID does not exist
• -10020 (COMP_FILE_ACCESS_ERR): There was an error accessing the specified cable
compensation file
• -10021 (COMP_FILE_NOT_EXIST): The specified compensation file does not exist
• -10045 (KI82_NOT_IN_KCON): There is no CMTR defined in your system configuration
• -10023 (KI590_MEAS_ERROR): A measurement error occurred
• -10101 (ARRAY_SIZE_TOO_SMALL): The specified value for CHF_ArrSize,
G_or_R_ArrSize, or Time_ArrSize was too small for the number of steps in the sweep
• -10102 (ERROR_PARSING): There was an error parsing the response of the 590.
• -10104 (USER_CANCEL): The user canceled the correction procedure.
• -10090 (GPIB_ERROR_OCCURRED): A GPIB communications error occurred
• -10100 (INVAL_PARAM): An invalid input parameter is specified

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English

Summary

Safety Precautions

General Safety Precautions

Essential safety guidelines for operating the instrument and associated equipment.

Electrical Shock Hazards

Details on identifying and avoiding hazardous voltage conditions and electric shock risks.

Using Switch Matrices

Matrix Card Types

KCon Setup for Switch Matrix

Configure and Use a Series 700 Switching System

Update Switch Configuration in KCon

Guide to managing instrumentation configuration using KCon after physical connections.

Set Up Measurements in Clarius

Steps to configure and run tests using the Clarius application with the switching system.

Using a Model 590 C-V Analyzer

Model 590 Test Examples

Using a Keysight 4284/4980A LCR Meter

C-V Measurement Basics

Capacitance Measurement Tests

Using KCon to Add Keysight LCR Meter

Instructions for adding the Keysight LCR Meter to the 4200A-SCS system configuration.

Using a Model 82 C-V System

Capacitance Measurement Tests

User modules for capacitance testing using the Model 82, including C-t, Simultaneous C-V, and QTsweep.

Simultaneous C-V Measurements

How the 590 and 595 measure capacitance during the same voltage sweep for C-V analysis.

Cable Compensation

Procedure to correct unwanted capacitances by connecting known sources.

Model 82 Projects

Using a Keysight 8110A/8111A Pulse Generator

Pulse Generator Tests

Using KCon to Add Keysight Pulse Generator

Steps to add the pulse generator to the 4200A-SCS system configuration using KCon.

Set Up a Probe Station

Prober Control Overview

How the 4200A-SCS controls probe stations using GPIB or RS-232 interfaces.

PRBGEN User Library

Prober-control software provided by vendors, accessed via the PRBGEN user modules.

Example Test Execution Sequence: Probesites Project

Using a Cascade Microtech PA200 Prober

Cascade Microtech PA200 Prober Software

Load, Align, and Contact the Wafer

Using a Micromanipulator 8860 Prober

Micromanipulator 8860 Prober Software

Set Up Wafer Geometry

Create a Site Definition and Define a Probe List

Using a Cascade Summit-12000 Prober

Cascade Summit-12000 Prober Software

Set Up Probers using the Velox Prober Control Software

Set Up Probers using the Nucleus UI Prober Control Software

Using a Signatone CM500 Prober

Signatone CM500 Prober Software

Using an MPI Probe Station

MPI Prober Software

Probe Station Configuration

Steps to set up and configure the MPI prober for use with the 4200A-SCS.

Set Up Communications

Use KCon to Add a Prober