Tektronix Keithley 4200A-SCS - Page 170

Section 6: Using a Model 82 C-V System Model 4200A-SCS Prober and External Instrument Control
6-62 4200A-913-01 Rev. A December 2020
Doping concentration
Effective oxide charge
Effective charge concentration
Flatband capacitance
Where  = extrinsic DeBye length =
N
x
= N at 90% W
MAX
, or N
A
, or N
D
when input by the user
Flatband voltage shift
Interface trap capacitance and Interface trap density
Mobile ion charge concentration – TVS method