Tektronix Keithley 4200A-SCS - Page 171

Model 4200A-SCS Prober and External Instrument Control Section 6: Using a Model 82 C-V System
4200A-913-01 Rev. A December 2020 6-63
Mobile ion charge concentration – STVS method
Oxide thickness / gate area
Series resistance compensation
a = G
M
- (G
2
M
+ 
2
C
2
M
) R
SERIES
Threshold voltage
Work function
Zerbst plot (generation lifetime and velocity)