Tektronix Keithley 4200A-SCS - Page 8

Model 4200A-SCS Prober and External Instrument Control
Table of contents
Front-panel connections ............................................................................................................ 6-6
Rear-panel connections ............................................................................................................ 6-7
Make power and GPIB connections .......................................................................................... 6-8
Using KCon to add Model 82 C-V System ........................................................................... 6-9
Model 82 projects ................................................................................................................. 6-9
Cable compensation tests ......................................................................................................... 6-9
Capacitance tests .................................................................................................................... 6-13
Formulas for capacitance tests ............................................................................................... 6-20
Choosing the right parameters ........................................................................................... 6-23
Optimal C-V measurement parameters ................................................................................... 6-23
Determining the optimal delay time ......................................................................................... 6-25
Correcting residual errors ........................................................................................................ 6-27
ki82ulib user library ............................................................................................................ 6-29
Abortmodule82 ........................................................................................................................ 6-29
CableCompensate82 user module .......................................................................................... 6-29
CtSweep82 user module ......................................................................................................... 6-32
DisplayCableCompCaps82 user module ................................................................................ 6-35
QTsweep82 user module ........................................................................................................ 6-37
SaveCableCompCaps82 user module .................................................................................... 6-40
SIMCVsweep82 user module .................................................................................................. 6-42
Simultaneous C-V analysis ................................................................................................ 6-45
Analysis methods .................................................................................................................... 6-45
Basic device parameters ......................................................................................................... 6-46
Doping profile .......................................................................................................................... 6-53
Interface trap density ............................................................................................................... 6-54
Mobile ion charge concentration ............................................................................................. 6-55
Generation velocity and generation lifetime (Zerbst plot) ........................................................ 6-58
Constants, symbols, and equations used for analysis ............................................................. 6-60
Summary of analysis equations .............................................................................................. 6-61
References .............................................................................................................................. 6-64
Bibliography of C-V Measurements ......................................................................................... 6-64
Articles and Papers ................................................................................................................. 6-64
Using a Keysight 8110A/8111A Pulse Generator ................................................... 7-1
Introduction .......................................................................................................................... 7-1
Pulse generator tests ........................................................................................................... 7-2
Signal connections ............................................................................................................... 7-2
GPIB connections ................................................................................................................ 7-4
Using KCon to add a Keysight pulse generator to the system ............................................ 7-4
HP8110ulib user library ........................................................................................................ 7-5
PguInit8110 user module .......................................................................................................... 7-5
PguSetup8110 user module ...................................................................................................... 7-6
PguTrigger8110 user module .................................................................................................... 7-8
Set up a probe station.............................................................................................. 8-1
Prober control overview ....................................................................................................... 8-1
Supported probers .................................................................................................................... 8-3
PRBGEN user modules ............................................................................................................ 8-3
Example test execution sequence: probesites project .............................................................. 8-4
Example test execution sequence: probesubsites project ......................................................... 8-5