DMM data 
acquisition
XD DMM data DMM data input   *Out-of-range setting results in a parameter error.
Current source/limiter 
calibration
[Calibration mode setting]
[Range setting]
Enters the DMM data input mode.
Within 
tolerance range?
DMM data 
acquisition
XD DMM data DMM data input   *Out-of-range setting results in a parameter error.
DMM data 
acquisition
Checks the calibration result.
Calibration result data 
save and display
DMM data 
acquisition
Calibration result data 
save and display
IS mode IL-Hi mode IL-Lo mode