Inficon SQC-310

6 - 10
PN 074-550-P1D
SQC-310 Operating Manual
Thickness reading has
large excursions during
deposition.
Mode hopping due to
damaged crystal.
Replace the crystal.
Crystal is near the end of its
life.
Replace the crystal.
Scratches or foreign particles
on the crystal holder crystal
seating surface.
Clean the crystal seating
surface inside the crystal
holder or replace crystal
holder. Refer to sensor
operating manual for
cleaning instructions.
Uneven coating onto crystal. A straight line from center of
source to center of crystal
should be perpendicular to
face of crystal.
Particles on crystal. Replace crystal.
Remove source of particles.
Intermittent cables or
connections.
Use an ohmmeter to check
electrical continuity / isolation
of sensor head, feedthrough,
in-vacuum cable, and BNC
cables. Refer to the sensor
operating manual for detailed
troubleshooting information.
Inadequate cooling of crystal. Check water flow rate and
temperature for sensor
cooling.
Thickness reading has
large excursions during
source warm-up or when
source shutter is opened
(usually causes Thickness
reading to decrease) and
after the termination of
deposition (usually causes
Thickness reading to
increase).
Crystal not properly seated
or crystal holder crystal
seating surface is dirty.
Check crystal installation.
Clean the crystal seating
surface inside the crystal
holder or replace crystal
holder. Refer to sensor
operating manual for
cleaning instructions.
Table 6-1 Symptom/Cause/Remedy Chart (continued)
SYMPTOM CAUSE REMEDY