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PN 074-550-P1C
SQC-310 Operating Manual
Quick Edit parameters are described below:
Initial Rate: The beginning rate of deposition for this layer. This is the target rate
that the control loop tries to maintain throughout the deposition (assuming no rate
ramps are used).
Final Thickness: The desired final thickness of this layer. The deposition phase of
this layer will end when this thickness is reached.
P Term: The proportional term sets the gain of the control loop. High gains yield
more responsive (but potentially unstable) loops. Try a value of 25, then gradually
increase/decrease the value to respond to step changes in rate setpoint.
I Term: The integral term controls the time constant of the loop response. Try 0.5
to 1 seconds for e-beam systems, 5 to 10 s for thermal systems.
D Term: The differential term causes the loop to respond quickly to changes.
Use 0 or a very small value to avoid oscillations.
NOTE: See section 7.5, Control Loop, on page 7-5 for details on adjusting the
PID control loop terms.
Max Power: The maximum output power allowed for the selected source.
Power is limited to this value and a power alarm occurs if the power remains at
the maximum for the time set for Power Alarm Delay.
Slew Rate: The maximum power change allowed on an output, in % of Full Scale
per second. If power or rate ramps exceed this value, an error will occur.
Material: Assigns a material to the film. As materials change, their density and
Z-Ratio (Z-Factor) are updated.
Density: Sets the density for this material. Material density has a significant impact
on deposition calculations.
Z-Factor: Sets the Z-Ratio, which is the acoustic impedance of the quartz crystal
to that of the deposited material. It is an empirically determined measure of the
effect a material has on quartz crystal frequency change.
Film Tooling: Compensates for sensor sensitivity to the selected material.
Use Xtal Tooling in the System Parameters menu to compensate for each sensor
individually.
Rate Filter Alpha: Selects the amount of filtering used to display rate data.
An Alpha of 1 is no filtering. An Alpha of 0.1 is heavy filtering.
NOTE: Low alpha values give a very stable display, but will lag actual rate
readings and can hide noise problems.
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