Tektronix Keithley 4200A-SCS User Manual

Model 4200A-SCS Prober and External Instrument Control Section 10: Using a Micromanipulator 8860 Prober
4200A-913-01 Rev. A December 2020 10-15
8. Set overdrive (user preference).
9. In the pcNav window, click the DN button, then press the Set Z UP/DN button.
10. When the SET Prb8860 Up/Down/Ovd window opens, press the Set Base Pt button.
11. Lower the platen to the point where you see good clean probe marks.
12. Click the Set 2nd Pt button.
13. Click the OVD button in pcNav to ensure that the overdrive will be used. Test the settings by
pressing the UP and DN buttons in pcNav.
Figure 199: Down pushbutton
14. Click Done.
Align the wafer
To align the wafer:
1. Click the Align Wafer button on the Tools panel of the pcNav window. The Prb8860 Alignment
window opens.
Figure 200: Align wafer button
Figure 201: Prb8860 Alignment window
2. Select Ref Axis X in the Prb8860 Alignment dialog box.
3. Select Auto adjust other devices.
4. Move prober chuck to extreme left of the wafer. Look through the microscope and ensure the pins
are over the pads.
5. Click Set Base Pt.
6. Move to a die on the extreme right of the wafer.

Tektronix Keithley 4200A-SCS Specifications

General

Brand	Tektronix
Model	Keithley 4200A-SCS
Category	Measuring Instruments
Language	English