12 - 4
HAPSITE ER Operating Manual
High pressure error NEG/Ion pump depleted Mass
Spec requires service. Please
review section 2.4.3 for details on
the vacuum system.
Attach unit to Service Module and
pump down for 24 hours. (See
section 12.5, Attaching HAPSITE
to the Service Module, on page
12-6.) Perform autotune with unit
attached to SM. If autotune fails
after 3 tries, perform a manual
tune. Refer to Chapter 9, Tune.
Detach SM and re-start. If problem
persists contact INFICON for
technical support. Consider
replacing NEG.
NOTE: HAPSITE ER ionizer
cannot be replaced in the field-
must be replaced by trained
INFICON service personnel.
Filament shut off or will not open
Electron multiplier fault
Ion pump failure
MS emission error
Attaching or venting HAPSITE ER with a NEG that has
not cooled will cause total NEG consumption and
possibly result in severe damage to the HAPSITE Mass
Spectrometer components. It may also result in physical
injury since extreme heat generation from NEG
consumption will create hot surfaces.
Table 12-1 Diagnosing Problems - HAPSITE (continued)
Symptom Cause Remedy
To Next Page
Loading...
