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HAPSITE ER Operating Manual
6 When the Attach has successfully completed, the Service Module Attached
message will be displayed. (See Figure 12-13.)
Figure 12-13 Service Model Attached
NOTE: Both ATTACH SM and DETACH SM buttons will be grayed out
immediately after a successful attach while the system prepares.
12.6 Bakeout Procedure
A bakeout can be performed with or without the use of the Service Module. A
bakeout heats the NEG pump to 700°C
for a specified length of time. (The default
time setting is two hours). Contact INFICON technical support before performing
this procedure.
1 Click on the Service Module tab of the Properties menu.
2 Click on the Service button. (See Figure 12-14.)
Figure 12-14 Service Button on the Service Module tab
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