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HAPSITE ER Operating Manual
3 Verify that the settings match the setting displayed below and click Bakeout
NEG. (See Figure 12-15.)
Figure 12-15 Service window
4 If the bakeout is complete, run a blank method. If the bakeout was successful
HAPSITE ER will be operational. If the bakeout was unsuccessful, a high
pressure error will occur.
12.6.1 Reactivating the NEG Pump
Reactivating the NEG pump requires having the Service Module attached to
HAPSITE for at least 22 hours. This procedure is the same procedure that is used
to activate a new NEG pump.
1 Click on the Service Module tab of the Properties menu.
2 Click on the Service button. (See Figure 12-16.)
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