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Inficon HAPSITE ER
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12 - 14
HAPSITE ER Operating Manual
Figure 12-16 Service Button on the Service Module tab
3 Use the Activate NEG settings below as a guideline. However, change the
HAPSITE Pumpdown Time to 180. (See Figure 12-17.)
Figure 12-17 Service window
4 Click the Activate NEG button.
5 At the end of the reactivation, the program will detach the HAPSITE from the
Service Module as part of the process.

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