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Inficon HAPSITE ER - Page 418

Inficon HAPSITE ER
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14 - 7
HAPSITE ER Operating Manual
Vacuum Interconnect Valve. . . . . . The two-part valve which seals the HAPSITE
manifold, when closed, and opens it to the
vacuum pumps in the Service Module, when
open. The Vacuum Interconnect Valve is
powered by a motor within the Service
Module, under direction of the HAPSITE.
VSO Valve . . . . . . . . . . . . . . . . . . . . Voltage Sensitive Orifice valve. This valve
uses voltage applied to the valve to control
the size of its orifice. This in turn controls the
flow rate of gas through the HAPSITE ER.

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