Inficon SQC-310 User Manual

6 - 3
PN 074-550-P1D
SQC-310 Operating Manual
Frequency reading in
Sensor Information screen
is unstable or drifting (not
a normal frequency
decrease associated with
material being deposited
on the crystal).
Temperature of the crystal is
unstable (an AT-cut crystal
may drift as much as
10 Hz/°C).
Control the vacuum chamber
temperature.
Move the crystal farther away
from the source (at least
25.4 cm (10 in.) from source).
Check sensor water cooling
for correct flow and
temperature. Refer to the
sensor operating manual.
Clean or replace the crystal
holder. Refer to the sensor
operating manual for
cleaning instructions.
Use SPC-1157-G10 thermal
shock crystals designed to
minimize frequency shifts
due to heat load.
Table 6-1 Symptom/Cause/Remedy Chart (continued)
SYMPTOM CAUSE REMEDY

Inficon SQC-310 Specifications

General

Model	SQC-310
Category	Controller
Type	Thin Film Deposition Controller
Measurement Technology	Quartz Crystal Microbalance (QCM)
Channels	1
Input Voltage	100-240 VAC
Operating Temperature	15 to 35°C
Measurement Principle	Quartz Crystal Microbalance (QCM)
Sensor Compatibility	Inficon QCM Sensors
Power Requirements	50/60 Hz
Communication Interfaces	RS-232
Storage Temperature	-20 to 70 °C