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Inficon SQC-310 User Manual
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PN 074-550-P1
D
SQC-310 Operating Manual
W
ARNING
Never interrupt the protective earth circuit.
This symbol indicates where the protec
tive earth ground
is connected inside SQC-310.
Never unscrew or loosen this conn
ection.
Disconnecting the protective earth term
inal or
interrupting the protective earth circuit, whether in
side or
out
side of SQC-310, may render SQC-310 dangerous.
17
19
Table of Contents
Introduction
15
Related Operating Manuals
16
General Safety Information
17
How to Contact INFICON
19
SQC-310 Specifications
20
Power
21
Display
22
Film Parameters
23
Unpacking and Inspection
24
Accessories
25
Handheld Remote Controller
26
Initial Power-On Verification
27
Introduction
29
Front Panel
31
Rear Panel
32
System Connections
33
Ground Requirements
34
Establishing Earth Ground
35
Rack Mount
36
Installation
37
Rack Adapter
38
Installation
39
Interfacing SQC-310 to CI-100 Crucible Indexer
40
Individual (Binary - as Defined by CI-100) I/O Setup
41
Interfacing SQC-310 to EBS-530 E-Beam Sweep Controller
42
Thin Film Deposition Overview
45
Thin Film Deposition Phases
46
SQC-310 Menu Overview
47
Main Screen, Menu 1
49
Main Screen, Menu 2
50
Main Screen, Menu 3
51
Quick Edit Menu
52
Process Menus
54
Process Menu - Edit Layer
56
Layer Copy, Insert, and Delete Menus
59
Film Menus
61
Film Edit Menu
62
Film Conditioning Menu
65
Film Deposit Controls Menu
66
Film Configure Sensor Menu
68
System Menu
69
Input and Relay Menus
71
Logic Menu
74
Creating a Logic Statement
75
Logic Statement Conditions (IF)
76
Logic Statement Actions (THEN)
79
Sensors and Sources Menu
80
Source Setup
83
Introduction
85
USB Port
86
Accessing Network Settings in Windows XP
87
Accessing Network Settings in Windows 7 and Windows 8
90
How to Change the SQC-310 IP Address
92
SQC-310 Communications Protocol
93
Command Packet (Host to SQC-310 Message)
94
Response Packet (SQC-310 to Host Message)
95
Calculating the CRC
96
SQC-310 Commands
97
Get/Set Film Parameter Examples
99
Get/Set System Parameter Examples
100
Get/Set Process Parameter Examples
101
Get/Set Layer Parameters
102
Get/Set Layer Parameter Examples
103
Get/Set Material Parameter Examples
104
Get/Set Input and Relay Parameter Examples
106
Get/Set Sensor and Source Parameters
107
Get/Set Sensor and Source Parameter Examples
108
Get/Set Logic Statement Parameters
109
Get Num Channels
110
Get Readings Examples
111
Get Output Rate Example
112
Get Sensor Frequency/Crystal Life
113
Get/Set Output Power
114
Set Active Process Example
115
Get Run State
116
Get Run State Examples
117
Start/Stop Download/Upload Session
118
Java ®
121
Introduction
123
Main Window
124
Data Log Menu
126
Instrument Window
128
Process Tree
130
Film Menu
131
Materials Menu
132
Sensor Setup Menu
133
Source Setup Menu
134
Digital I/O Setup Menu
135
Logic Statements Menu
138
Creating Logic Statements
140
Graph Menu
141
Communications Setup Menu
142
View Menu
144
Help Menu
145
Troubleshooting Guide
147
Cleaning
160
Spare Parts
162
Persistent Crystal Fail Indication
163
Importance of Density, Tooling and Z-Ratio
165
Determining Tooling
166
Laboratory Determination of Z-Ratio
167
Control Loop
169
Identifying a Fast or Slow Source
171
Control Loop Tuning Procedure
172
Basics
177
Monitor Crystals
178
Period Measurement Technique
180
Z-Match Technique
181
A.1 Introduction
183
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Inficon SQC-310 Specifications
General
Brand
Inficon
Model
SQC-310
Category
Controller
Language
English
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