Inficon SQC-310

3 - 23
PN 074-550-P1C
SQC-310 Operating Manual
Control Error: If the control loop cannot maintain the desired deposition rate due
to loss of source material, excess rate ramps, equipment malfunction, or a control
error occurs, the Control Error will respond accordingly with the programmed
response.
 Ignore: The error condition is ignored.
 Stop: All source outputs return to 0% power.
 Hold: The output power is held at the same level as when the error occurred.
The process will continue to be monitored until Final Thickness is reached.
 Error %: Specifies the rate threshold for Control Error. Only available when
Stop or Hold are selected for Control Error.
Rate Sampling: Rate sampling can extend the life of crystals. With rate sampling,
the deposition rate is sampled for a period of time, then the sensor shutter is
closed. Power is held at the same level as the final power setting during the sample
period.
 Continuous: Disables Rate Sampling. Sensor shutter remains open during
deposition.
 Accuracy: The sampling phase ends when the rate is maintained within the
Accuracy setting percent of the Init Rate setting. The hold phase is then active
for a specific time.
 Time Based: The sampling phase ends after a set amount of time (Sample
Time). The hold phase is then active for a specific time.
 Accuracy: The threshold, in percent of Init Rate (refer to section 3.8 on page
3-12), which must be maintained in or order to move to the hold phase. Only
available if Rate Sampling is set to Accuracy.
 Sample Time: The amount of time before the sampling phase ends. Only
available if Rate Sampling is set to Time Based.
 Hold Time: The amount of time to maintain the hold phase. Used if Rate
Sampling is set for either Accuracy and Time Based.