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PN 074-550-P1C
SQC-310 Operating Manual
Period: Sets the measurement interval between 0.1 second (10 readings per
second) and 1 second. A longer period gives higher reading accuracy, especially
in low rate and low density applications.
Period Frequency
(seconds)
Resolution (Hz)
0.10 0.03
0.25 0.01
0.50 0.005
0.75 0.004
1.00 0.003
Simulate Mode: Normal mode uses quartz crystal sensors as inputs to SQC-310
for rate and thickness readings. Simulate mode simulates the quartz crystal sensor
based on the crystal frequency min/max. Simulate mode is useful for debugging
process recipes but does not accurately mimic actual process control performance.
NOTE: Source output power must typically be 50% or more to simulate a non-zero
deposition rate.
System Tooling: Adjusts for global deposition rates that differ from the measured
substrate deposition rate (see section 7.3 on page 7-2).
Min/Max Frequency: The frequency values for the quartz crystal sensors used as
inputs to SQC-310. The maximum frequency should be set to the frequency of a
new crystal, typically 6 MHz. Sensor readings outside the minimum and maximum
frequency values cause a crystal failure.
Dev Graph Limit: Sets the upper limit for the Rate Deviation graph Y-axis.
Rate Filter Alpha: Selects the amount of filtering used to display rate data. An
Alpha of 1 is no filtering. An Alpha of 0.1 is heavy filtering (10 measurement rolling
average).
RS-232 Comm: Baud rate used for RS-232 communications.
Password Enable: If Password is enabled, the Quick Start, Film, and System
menus require a password. The Process menu can be used to select a process,
but a password is required to make any changes on the Process menu.
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