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PN 074-550-P1D
SQC-310 Operating Manual
Crystal Fail is displayed
during deposition before
“normal” life of crystal is
exceeded.
Crystal oscillation is weak
due to excessive cable
length between oscillator and
crystal.
In-vacuum cable length
should not exceed 78.1 cm
(30.75 in.).
Use the 15.2 cm (6 in.) cable
between oscillator and
feedthrough.
Crystal Fail is displayed
when vacuum chamber is
opened to air.
Crystal was near the end of
its life; opening to air causes
film oxidation, which
increases film stress.
Replace the crystal.
Excessive moisture
accumulation on the crystal.
Avoid condensation by
turning off cooling water to
sensor before opening the
vacuum chamber to air, and
then flow heated water above
the dew point of the room
through the sensor when the
chamber is open.
Table 6-1 Symptom/Cause/Remedy Chart (continued)
SYMPTOM CAUSE REMEDY
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