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PN 074-550-P1D
SQC-310 Operating Manual
Thickness reproducibility
is poor.
Erratic evaporation flux
characteristics.
Move sensor to a different
location.
Check the evaporation
source for proper operating
conditions.
Ensure relatively constant
pool height and avoid
tunneling into the melt.
Assign multiple sensors to
the source.
Material does not adhere well
to the crystal.
Check for contamination on
the crystal surface.
Evaporate an intermediate
layer of appropriate material
onto the crystal to improve
adhesion.
Use gold, silver, or alloy
crystals, as appropriate.
Rate control is poor. PID control loop parameters
are not optimized.
Test in Manual mode to
ensure a stable rate is
possible.
Change PID control loop
parameters (see section 7.5
on page 7-5).
Period and/or Rate Filter
Alpha parameters are not
optimized.
Change Period and/or Rate
Filter Alpha values (refer to
section 3.12 on page 3-25).
Electron beam sweep
frequency “beating” with the
SQC-310 measurement
frequency.
Adjust the sweep frequency
so it is not in phase with the
SQC-310 measurement
frequency.
Table 6-1 Symptom/Cause/Remedy Chart (continued)
SYMPTOM CAUSE REMEDY
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