3 - 13
PN 074-550-P1C
SQC-310 Operating Manual
A description of each parameter on the Layer Edit menu follows:
Initial Rate: The beginning rate of deposition for this layer. This is the target rate
that the control loop tries to maintain throughout the deposition (assuming no rate
ramps are used).
Final Thickness: The desired final thickness of this layer. The deposition phase of
this layer will end when this thickness is reached.
Time Setpoint: Sets a time, after deposition begins, when the Time Setpoint logic
event becomes true.
Thickness Setpoint: Sets a thickness when the Thickness Setpoint logic event
becomes true.
Start Mode: Determines whether a layer begins automatically upon completion
of the previous layer. If Manual Start is selected, the previous layer ends at its idle
power and waits for the operator to press the Start button.
Sensor 1-4: Activates/Deactivates each quartz crystal sensor to be used for the
selected film. If multiple sensors are assigned to a film, their readings are
averaged. If multiple sensors are assigned to a film, and one fails, it is excluded
from measurements. Sensors 3 and 4 will not be displayed unless the optional
sensor board is installed in SQC-310 or SQC-310C is used.
Source: Selects the source output that is active for the selected layer.
Max. Power: The maximum output power allowed for the selected source. Power
is limited to this value and a power alarm occurs if the power remains at the
maximum for Power Alarm Delay seconds.
Table 3-7 Layer Edit Menu buttons
To Main Returns to the Main menu.
Prev Menu Returns to the Layer Select menu.
Edit Opens the selected parameter for edit. Button functions change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Rotate to change value. Press the control knob to
store the value and move to the next parameter.
Control Knob Rotate the control knob counterclockwise or clockwise to change
the selected parameter. Press the control knob to select a
parameter value to edit. With the parameter selected, rotate the
control knob counterclockwise or clockwise to change the value.
Once the desired change is made, press the control knob to save
the change for the selected parameter and to automatically scroll
down to the next parameter value for editing.
To Next Page
Loading...
Need help?
General
