3 - 20
PN 074-550-P1C
SQC-310 Operating Manual
Crystal Quality, Counts: A counter is incremented each time Crystal Quality, Rate
Deviation is exceeded, then decremented each time a reading is within the rate
deviation. If the counter reaches Crystal Quality, Counts during a layer, the process
is aborted. Setting this value to zero disables the Crystal Quality alarm.
NOTE: The Crystal Quality settings are very sensitive to PID loop tuning. It is
best to leave Crystal Quality disabled until the stability of the process
and PID settings are confirmed.
Crystal Stability, Single: As material is deposited on the crystal, the frequency
normally decreases. However, arcing, mode hopping, or external stresses may
cause the crystal frequency to increase. If a single large positive frequency shift
exceeds this value (in Hz) during a process, a crystal fail condition is indicated.
Crystal Stability, Total: As material is deposited on the crystal, the frequency
normally decreases. However, arcing, mode hopping, or external stresses may
cause the crystal frequency to increase. If the accumulated value of these positive
frequency shifts exceeds this value (in Hz) during a process, a crystal fail condition
is indicated.
Material: Selects a material assigned to this film. As materials change, their
density and Z-Ratio is updated.
Density: Sets the density for this material. Material density has a significant impact
on deposition calculations. Common materials, densities, and Z-Ratios are listed in
Appendix A.
Z-Factor: Sets the Z-Ratio, an empirically determined measure of the effect a
material has on quartz crystal frequency change. Common materials, densities,
and Z-Ratios are listed in Appendix A.
To Next Page
Loading...
Need help?
General
