Inficon SQC-310 User Manual

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PN 074-550-P1C
SQC-310 Operating Manual
Crystal Fail
Stop Layer
Sensor Feedback Timeout
Source Feedback Timeout
Sensor Feedback Error
Source Feedback Error
Invalid Crystal Position
Invalid Pocket Position
Internal Events: Allows the operator to select an internal event as a condition.
Available events include:
Simulate
Manual Mode
Interlock
Last Layer
Process Hold
Process Active
Process Stopped
Shutter Delay Error
Thickness Setpoint
Final Thickness
Time Setpoint
Soak Hold
Rate Dev Alarm
Max Power Alert
Min Power Alert
Crystal Index: Allows the user to select a specific crystal on a multi-crystal sensor
as a condition. Choose sensor 1 to 4 and crystal 1 to 16.
Pocket Index: Allows the user to select a specific pocket on a multi-pocket source
as a condition. Choose source 1 to 4 and pocket 1 to 16.
Processes: The process condition is evaluated true whenever the selected
process is the current process. Choose process 1 to 100.
Layers: The layer condition is evaluated true whenever the current layer number
equals the specified layer number. Choose layer 1 to 1000.

Inficon SQC-310 Specifications

General

Brand	Inficon
Model	SQC-310
Category	Controller
Language	English