Training Guide Course No. 196514
Level 2 Maintenance, X-1000 Series Dispensing Systems 1-26 P/N 196515 (Revision A)
Information Sheet 1-6-1
Facility Requirements
A. Facility Requirements
1. To ensure optimal performance and safety, it is necessary to install the
dispensing system in a facility that meets or exceeds the following
requirements.
Characteristic Specification
Floor Space Required See Diagram Sheet 1-6-1 on page 1-27.
Minimum Horizontal
Clearance
(Servicing Footprint)
Should be in accordance with:
SEMI S8-600 2000 – Safety Guidelines for Ergonomics
Engineering of Semiconductor Manufacturing Equipment,
Appendix 1 - Supplier Ergonomic Success Criteria (SESC),
Section 7 - Maintainability and Serviceability.
Power 180 to 260 VAC, 50/60 Hz, 21.7 amperes maximum current
consumption
Air Supply Pressure: 586 to 620 kPa (85 to 90 psi)
Flowrate: 140 liters/min at 655 kPa (5 CFM at 95 psi)
Pneumatic Fitting
Required
Quick Disconnect: 1/4-in. female, industrial, per A-A-59439
(Coupling Halves, Quick-Disconnect) or equivalent
Standard Fitting: 1/4-in. female, NPT thread
Facility Environment
Storage/Operation Temperature: 5 to 50 °C (41 to 122 °F)
Relative Humidity: 5 to 90% (non-condensing)
Altitude: 1609 meters (5278 feet) maximum
2. All air hoses must be checked routinely and all facility power sources must be
safely grounded.
3. Facility Power Requirements depend upon your dispensing system
configuration
B. Facility Safety Precautions
1. Make sure that your facility meets or exceeds all facility requirements before
installing your X-1000 Series dispensing system.
2. X-1000 installation should only be performed by a trained service technician.
3. If the dispensing system is located inside of a clean room, make sure that all
documentation materials meet clean room standards.
4. Make sure that all connections on the power cords and air supply hoses are
solid connections.
5. Make sure that the power cords or do not cross a walkway or aisle.
6. Make sure that the air supply hose does not cross a walkway or aisle.
To Next Page
Loading...
Need help?
General