Scanlab RTC 5 PC Interface Board - Page 9

RTC
®
5 PC Interface Board
Rev. 1.9 e
Contents
9
innovators for industry
8 Advanced Functions for Scan Head and Laser Control .................................................................. 152
8.1 iDRIVE
®
Functions ....................................................................................................................... 152
8.1.1 Transfer Protocol .............................................................................................................. 152
8.1.2 Configuring Status Return Behavior ................................................................................. 153
Selecting Data Signals ................................................................................................ 153
Querying Data ............................................................................................................ 153
8.1.3 Position Monitoring ......................................................................................................... 154
8.1.4 Configuring Dynamics Settings (Tuning) .......................................................................... 155
8.1.5 Jump Mode ...................................................................................................................... 156
Functional Principle .................................................................................................... 156
Requirements and Activation ...................................................................................... 157
Jump-Length-Dependent Jump Delays ....................................................................... 157
Experimental Determination of Jump Delay Values ..................................................... 158
Notes on Loading Determined Jump Delay Values ...................................................... 158
Automatic Determination of the Jump Delay Table ..................................................... 159
8.1.6 Configuring the PosAcknowledge Threshold Value .......................................................... 160
8.1.7 Configuring the Effective Calibration ............................................................................... 160
8.1.8 Configuring the Start Behavior ......................................................................................... 160
8.1.9 Fault Diagnosis and Functional Test .................................................................................. 161
8.2 Coordinate Transformations ........................................................................................................ 161
8.3 Online Positioning ....................................................................................................................... 165
Configuring Online Positioning ................................................................................... 165
Notes .......................................................................................................................... 166
8.4 Wobbel Mode ............................................................................................................................. 167
8.4.1 Wobbel Shapes – Important Notes on Choosing Appropriate Parameter Values .............. 168
“Classic” Wobbel Shapes ............................................................................................ 168
“Freely Definable Wobbel Shapes” ............................................................................. 169
8.5 Using Several Different Correction Tables .................................................................................... 170
8.5.1 Configuration with Two 2D Scan Systems ........................................................................ 170
8.5.2 Using Several Correction Tables with a Single Scan System .............................................. 170
8.6 Controlling a 3-Axis Scan System (Optional) ............................................................................... 171
8.6.1 Intended Use .................................................................................................................... 171
8.6.2 Connection and Initialization ........................................................................................... 171
8.6.3 3D Marking Commands ................................................................................................... 172
8.6.4 Adjustment ...................................................................................................................... 174
Checking the Z-Axis Calibration .................................................................................. 174
Test for 3-Axis Scan Systems with F-Theta Objective ................................................... 175
8.6.5 Enhanced 3D Correction .................................................................................................. 176
8.7 Processing-on-the-fly (Optional) .................................................................................................. 177
8.7.1 Intended Use and Initialization ........................................................................................ 177
Overview .................................................................................................................... 178
8.7.2 Compensation of Linear Movements ................................................................................ 179
Correction via Encoder Counter(s) .............................................................................. 179
Correction via McBSP Interface ................................................................................... 180
Correction via McBSP Interface with Additional McBSP Input ..................................... 181
Correction via McBSP Interface with Enhanced McBSP Input ...................................... 181
8.7.3 Compensation of Rotary Movements ............................................................................... 181
Correction via Encoder Counter .................................................................................. 181
Correction via McBSP Interface ................................................................................... 182
Correction via McBSP Interface with Additional McBSP Input ..................................... 183
8.7.4 Compensation of 2D Motions .......................................................................................... 184
2D Encoder Compensation for XY Stages ................................................................... 184