XPS Unified Programmer’s Manual
©2018 by Newport Corporation, Irvine, CA. All rights reserved.
Original instructions.
No part of this document may be reproduced or copied without the prior written
approval of Newport Corporation. This document is provided for information only, and
product specifications are subject to change without notice. Any change will be
reflected in future publishings.
EDH0373En1023 — 01/18 ii
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