Newport XPS-D Programmer's Manual

XPS Unified Programmer’s Manual
6.1.2 Group Clamping Sequence
6.1.2.1 Clamping State Diagram
NOTES
In case of recoverable errors (go to DISABLE state or go to READY state), the
clamp is unclamped.
In case of fatal errors (go to NOT INIT state), the clamp stays in the current state
(clamped).
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Newport XPS-D Specifications

General

Brand	Newport
Model	XPS-D
Category	Controller
Language	English