Newport XPS-D - Group Clamping Sequence; Clamping State Diagram

XPS Unified Programmer’s Manual
6.2.2 Group Clamping Sequence
6.2.2.1 Clamping State Diagram
NOTES
In case of recoverable errors (go to DISABLE state or go to READY state), the
clamp is unclamped.
In case of fatal errors (go to NOT INIT state), the clamp stays in the current state
(clamped).
33 EDH0373En1023 — 01/18